Optimization of a Vacuum Thermal Evaporation Process through Model-Based Predictive Control of the Source Temperature
Zöller, Daniel (Corresponding author); Reiter, Matthias Christian (Corresponding author); Abel, Dirk (Corresponding author)
(2015)
Contribution to a conference proceedings, Journal Article
In: IFAC-PapersOnLine
Volume: 48
Issue: 11
Page(s)/Article-Nr.: 86-91
Institutions
- Chair and Institute of Automatic Control [416610]
Identifier
- DOI: 10.1016/j.ifacol.2015.09.164
- RWTH PUBLICATIONS: RWTH-2015-05648